
XLJ, Vacuum Angle Valve w/Release Valve
- SKU:
- -----
- Category:
- XL
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Description
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. - Compatible with inert gases - Flange sizes: 25 and 40 - Operating pressure range: Atmospheric to 0.01 Pa - Operating temperature: 5-40°C - Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC