XLFV-63DF-2M9//-5GZ

Description

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. - Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve - High corrosion resistance to fluorine gas - Minimal outgassing - Minimal contamination from heavy metals - Optional heaters - Optional position sensors - Optional oxalic acid anodizing for internals