XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

Description

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. - One-touch connection & release, requires no tools - Lightweight & compact - Auto switch capable - XLAQ: single acting, normally closed, bellows seal - XLAQ: flange sizes are 16, 25, 40, 50 - XLDQ: 2-step control, single acting - XLDQ: flange sizes are 40, 50